Electron-Beam-Induced Nucleation Centers and Selective...

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Electron-Beam-Induced Nucleation Centers and Selective Deposition of Thin Zinc Films

X. Chen, A. Morimoto, K. Nagai, M. Kumeda, T. Shimizu
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Year:
2002
Language:
english
DOI:
10.1143/JJAP.41.775
File:
PDF, 542 KB
english, 2002
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