![](/img/cover-not-exists.png)
Film Bulk Acoustic Resonator using High-Acoustic-Impedance Electrodes
M. Ueda, T. Nishihara, S. Taniguchi, T. Yokoyama, J. Tsutsumi, M. Iwaki, Y. SatohYear:
2007
Language:
english
DOI:
10.1143/JJAP.46.4642
File:
PDF, 414 KB
english, 2007