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Feasibility Study on Immersion System Using High-Index Materials
K. Sakai, Y. Iwasaki, S. Mori, A. Yamada, M. Ogusu, K. Yamashita, T. Nishikawara, S. Hara, Y. WatanabeYear:
2008
Language:
english
DOI:
10.1143/JJAP.47.4853
File:
PDF, 227 KB
english, 2008