Comparison of Nanocrystalline TiO2Films Prepared on Unheated Substrates Using Single- and Dual-Cathode DC Unbalanced Magnetron Sputtering Systems
N. Witit-anun, P. Kasemanankul, S. Chaiyakun, A. Pokaipisit, P. LimsuwanYear:
2010
Language:
english
DOI:
10.1143/JJAP.49.051101
File:
PDF, 138 KB
english, 2010