Dimensional metrology for nanometre-scale science and...

Nanotechnology 2004 / 10 Vol. 15; Iss. 10

Dimensional metrology for nanometre-scale science and engineering: towards sub-nanometre accurate encoders

Heilmann, Ralf K, Chen, Carl G, Konkola, Paul T, Schattenburg, Mark L
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Volume:
15
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/15/10/002
Date:
October, 2004
File:
PDF, 231 KB
english, 2004
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