Some aspects of substrate pretreatment for epitaxial Si...

Some aspects of substrate pretreatment for epitaxial Si nanowire growth

Lugstein, A, Hyun, Y J, Steinmair, M, Dielacher, B, Hauer, G, Bertagnolli, E
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Volume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/48/485606
Date:
December, 2008
File:
PDF, 1.06 MB
english, 2008
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