SPIE Proceedings [SPIE International Symposium on Optical Fabrication, Testing, and Surface Evaluation - Tokyo, Japan (Wednesday 10 June 1992)] Intl Symp on Optical Fabrication, Testing, and Surface Evaluation - Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements
Miyazaki, Eiichi, Nakanishi, Kunifumi, Yoshimura, Takeaki, Tsujiuchi, JumpeiVolume:
1720
Year:
1992
Language:
english
DOI:
10.1117/12.132113
File:
PDF, 150 KB
english, 1992