SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Advances in Laboratory-based X-Ray Sources and Optics - Development of an EUV reflectometer using a laser plasma x-ray source
Kondo, Hiroyuki, Kandaka, Noriaki, Sugisaki, Katsumi, Oshino, Tetsuya, Shiraishi, Masayuki, Ishiyama, Wakana, Murakami, Katsuhiko, MacDonald, Carolyn A., Khounsary, Ali M.Volume:
4144
Year:
2000
Language:
english
DOI:
10.1117/12.405906
File:
PDF, 187 KB
english, 2000