RF Probe Method for Space Potential Measurement in Medium...

RF Probe Method for Space Potential Measurement in Medium Pressure Plasmas

Matsumura, Shosaku, Chen, Sin-Li
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Volume:
16
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.16.1287
Date:
July, 1977
File:
PDF, 301 KB
english, 1977
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