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Focused Si Ion Implantation in GaAs
Bamba, Yasuo, Miyauchi, Eizo, Arimoto, Hiroshi, Kuramoto, Kazuo, Takamori, Akira, Hashimoto, HisaoVolume:
22
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.22.L650
Date:
October, 1983
File:
PDF, 838 KB
english, 1983