Kinetic Studies of the Electron-Beam-Pumped ArF Laser Using...

Japanese Journal of Applied Physics 1985 / 9 Vol. 24; Iss. Part 1, No

Kinetic Studies of the Electron-Beam-Pumped ArF Laser Using an Ne/Ar/F 2 Mixture

Suda, Akira, Obara, Minoru, Fujioka, Tomoo
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1183
Date:
September, 1985
File:
PDF, 100 KB
1985
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