Preparation of Multi-Layered Tungsten-Carbon Films by...

Preparation of Multi-Layered Tungsten-Carbon Films by Ion-Beam Sputtering

Takei, Koji, Maeda, Yasushi
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1366
Date:
October, 1985
File:
PDF, 419 KB
1985
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