Solid Phase Grain Growth and Electronic Properties of Si...

Japanese Journal of Applied Physics 1989 / 1 Vol. 28; Iss. Part 1, No

Solid Phase Grain Growth and Electronic Properties of Si + -Implanted Glow-Discherged a-Si:H Thin Films

Noguchi, Takashi, Ohshima, Takefumi, Hayashi, Hisao
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Volume:
28
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.146
Date:
January, 1989
File:
PDF, 412 KB
english, 1989
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