Silicon Selective Epitaxial Growth and Electrical...

Japanese Journal of Applied Physics 1989 / 5 Vol. 28; Iss. Part 1, No

Silicon Selective Epitaxial Growth and Electrical Properties of Epi/Sidewall Interfaces

Ishitani, Akihiko, Kitajima, Hiroshi, Endo, Nobuhiro, Kasai, Naoki
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Volume:
28
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.28.841
Date:
May, 1989
File:
PDF, 530 KB
english, 1989
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