Mechanism of Radiation Damage in SiO 2 /Si Induced by vuv Photons
Yunogami, Takashi, Mizutani, Tatsumi, Tsujimoto, Kazunori, Suzuki, KeizoVolume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.2269
Date:
October, 1990
File:
PDF, 279 KB
english, 1990