Formation of InP Metal-Insulator-Semiconductor Schottky...

Japanese Journal of Applied Physics 1990 / 10 Vol. 29; Iss. Part 2, No

Formation of InP Metal-Insulator-Semiconductor Schottky Junctions by UV Laser-Induced Photolytic Process of Phosphine Gas

Sugino, Takashi, Ito, Hiroyuki, Shirafuji, Junji
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1771
Date:
October, 1990
File:
PDF, 227 KB
english, 1990
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