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Effect of Visible-Light Illumination on the Growing Surface of an a-Si:H Film in Plasma Decomposition of SiH 4
Yamanaka, Mitsuyuki, Hayashi, Yutaka, Sakata, IsaoVolume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L217
Date:
February, 1990
File:
PDF, 299 KB
english, 1990