8” Uniform Electron Cyclotron Resonance Plasma Source Using...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 1, No

8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE 01 Mode Microwave

Hidaka, Ryota, Yamaguchi, Toru, Hirotsu, Nobuyoshi, Ohshima, Takaharu, Koga, Ryuji, Tanaka, Masayoshi, Kawai, Yoshinobu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.174
Date:
January, 1993
File:
PDF, 339 KB
english, 1993
Conversion to is in progress
Conversion to is failed