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8” Uniform Electron Cyclotron Resonance Plasma Source Using a Circular TE 01 Mode Microwave
Hidaka, Ryota, Yamaguchi, Toru, Hirotsu, Nobuyoshi, Ohshima, Takaharu, Koga, Ryuji, Tanaka, Masayoshi, Kawai, YoshinobuVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.174
Date:
January, 1993
File:
PDF, 339 KB
english, 1993