Poly-Silicon Thin-Film Transistors with Uniform Performance...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 1, No

Poly-Silicon Thin-Film Transistors with Uniform Performance Fabricated by Excimer Laser Annealing

Asai, Ichirou, Kato, Noriji, Fuse, Mario, Hamano, Toshihisa
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.474
Date:
January, 1993
File:
PDF, 1.53 MB
1993
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