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Freeze-Drying Process to Avoid Resist Pattern Collapse
Tanaka, Toshihiko, Morigami, Mitsuaki, Oizumi, Hiroaki, Ogawa, TaroVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5813
Date:
December, 1993
File:
PDF, 611 KB
1993