Influence of Sputtering Geometry on Crystallinity of...

Japanese Journal of Applied Physics 1993 / 2 Vol. 32; Iss. Part 2, No

Influence of Sputtering Geometry on Crystallinity of Al(110) Thin Films on Offset (100)Si

Yokoyama, Shin, Ichikawa, Hiroshi, Koyanagi, Mitsumasa
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L283
Date:
February, 1993
File:
PDF, 881 KB
1993
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