Evaporation of Oxygen-Bearing Species from Si Melt and...

Japanese Journal of Applied Physics 1994 / 4 Vol. 33; Iss. Part 1, No

Evaporation of Oxygen-Bearing Species from Si Melt and Influence of Sb Addition

Huang, Xinming, Terashima, Kazutaka, Sasaki, Hitoshi, Tokizaki, Eiji, Anzai, Yutaka, Kimura, Shigeyuki
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.1717
Date:
April, 1994
File:
PDF, 120 KB
english, 1994
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