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Structural Characteristics of Combination Oxide Consisting of Dry Thermal S i O 2 and Sputtered S i O 2
Bhan, Rajinder Kumar, Ashokan, Renganathan, Mathur, Parmatma ChandraVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.2708
Date:
May, 1994
File:
PDF, 325 KB
english, 1994