Electron Spin Resonance Image of Annealing under Thermal...

Japanese Journal of Applied Physics 1994 / 8 Vol. 33; Iss. Part 2, No

Electron Spin Resonance Image of Annealing under Thermal Gradient: Chemical Vapor Deposition Poly-Silicon Film

Ikeya, Motoji, Yamamoto, Masahiro
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1087
Date:
August, 1994
File:
PDF, 349 KB
1994
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