Wetting Failure of Photoresist on Spin-On-Glass (SOG)...

Japanese Journal of Applied Physics 1994 / 9 Vol. 33; Iss. Part 2, No

Wetting Failure of Photoresist on Spin-On-Glass (SOG) Substrate by Spin Coating

Kawai, Akira, Nagata, Hitoshi
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1355
Date:
September, 1994
File:
PDF, 226 KB
english, 1994
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