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Water Diffusivity of Dielectric Films Evaluated with Use of $\bf D_{2}O$
Fukuda, Kenji, Nakano, Tadashi, Fujishima, Masaaki, Mura, Naomi, Tokunaga, Kyoji, Ichinose, ShujiVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1445
Date:
October, 1994
File:
PDF, 344 KB
english, 1994