Influence of Local Feature of Electron Cyclotron Resonance Plasma on the Formation of Amorphous Hydrogenated Silicon Films
Chen, Wei, Miyake, Shoji, Ariyasu, Tomio, BunkeiKyou,Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.285
Date:
January, 1995
File:
PDF, 248 KB
english, 1995