Active Vibration Correction in Electron Beam Lithography...

Japanese Journal of Applied Physics 1995 / 12 Vol. 34; Iss. Part 1, No

Active Vibration Correction in Electron Beam Lithography System

Nagata, Kouji, Ohta, Hiroya, Morimura, Toshiyuki, Okumura, Masahide, Saitou, Norio
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Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.6639
Date:
December, 1995
File:
PDF, 953 KB
english, 1995
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