Evaluation of Acid Diffusibility in a Chemical...

Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film

Watanabe, Hiroshi, Sumitani, Hiroaki, Kumada, Teruhiko, Inoue, Masami, Marumoto, Kenji, Matsui, Yasuji
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.6780
Date:
December, 1995
File:
PDF, 924 KB
1995
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