Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
Watanabe, Hiroshi, Sumitani, Hiroaki, Kumada, Teruhiko, Inoue, Masami, Marumoto, Kenji, Matsui, YasujiVolume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.6780
Date:
December, 1995
File:
PDF, 924 KB
1995