Surface Alteration of Amorphous Si3N4 Films by ArF Excimer Laser Irradiation
Nakamae, Kazuo, Kurosawa, Kou, Takigawa, Yasuo, Sasaki, Wataru, Izawa, Yasukazu, MasahiroOkuda,Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.L1482
Date:
November, 1995
File:
PDF, 543 KB
english, 1995