Preparation and Electrical Properties of S r T i O 3 Thin Films Deposited by Liquid Source Metal-Organic Chemical Vapor Deposition (MOCVD)
Kang, Chang Seok, Hwang, Cheol Seong, Cho, Hag-Ju, Lee, Byoung Taek, Park, Soon Oh, Kim, Jin Won, Horii, Hideki, Lee, Sang In, Koh, Young Bum, Lee, Moon YongVolume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.4890
Date:
September, 1996
File:
PDF, 108 KB
english, 1996