Effect of Oxygen Ion Energy and Annealing in Formation of Tin Oxide Thin Films
Song, Seok-Kyun, Choi, Won-Kook, Cho, Jun-Sik, Jung, Hyung-Jin, Choi, Dongsoo, Lee, Jeong-Yong, Baik, Hong-Koo, Koh, Seok-KeunVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.2281
Date:
April, 1997
File:
PDF, 216 KB
english, 1997