IrO2/Pb(ZrxTi1-x)O3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to Hydrogen-Annealing Damage
Kushida-Abdelghafar, Keiko, Miki, Hiroshi, Yano, Fumiko, Fujisaki, YoshihisaVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.L1032
Date:
August, 1997
File:
PDF, 567 KB
1997