![](/img/cover-not-exists.png)
Epitaxial Growth of Aluminum on Silicon Substrates by Metalorganic Molecular Beam Epitaxy using Dimethyl-Ethylamine Alane
Neo, Yoichiro, Otoda, Toshihiro, Sagae, Katumi, Mimura, Hidenori, Yokoo, KuniyoshiVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.2602
Date:
May, 1998
File:
PDF, 1.20 MB
english, 1998