Effects of Oxygen Gas Addition and Substrate Cooling on...

Japanese Journal of Applied Physics 1998 / 9 Vol. 37; Iss. Part 1, No

Effects of Oxygen Gas Addition and Substrate Cooling on Preparation of Amorphous Carbon Nitride Films by Magnetron Sputtering

Yokomichi, Haruo, Sakima, Hiroyuki, Masuda, Atsushi
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.4722
Date:
September, 1998
File:
PDF, 261 KB
english, 1998
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