Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C 3 HF 7 O
Tanaka, Hideyuki, Toyoda, Hirotaka, Sugai, HideoVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.5053
Date:
September, 1998
File:
PDF, 632 KB
english, 1998