Characterization of RF-Enhanced DC Sputtering to Deposit Tin-Doped Indium Oxide Thin Films
Futagami, Toshiro, Shigesato, Yuzo, Yasui, ItaruVolume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.6210
Date:
November, 1998
File:
PDF, 139 KB
english, 1998