Accumulation of Negative Ions in Hollow-Type Electron...

Japanese Journal of Applied Physics 1999 / 7 Vol. 38; Iss. Part 1, No

Accumulation of Negative Ions in Hollow-Type Electron Cyclotron Resonance CF 4 Plasma Column

Mieno, Tetsu, Ogawa, Akira
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.4586
Date:
July, 1999
File:
PDF, 200 KB
english, 1999
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