Effects of N 2 Addition on Aluminum Alloy Etching in Inductively Coupled Plasma Source
Kim, Kil Ho, Baek, Kye Hyun, Shin, Kang Sup, Park, Changwook, Lee, Won GyuVolume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.6090
Date:
October, 1999
File:
PDF, 52 KB
english, 1999