Molybdenum Film Technology For Power Metal Oxide...

Japanese Journal of Applied Physics 2000 / 7 Vol. 39; Iss. Part 1, No

Molybdenum Film Technology For Power Metal Oxide Semiconductor Field Effect Transistor Gate Electrode Applications

Liu, Ying-Kun, Liang, Chun-Guang, Wang, Zhan-Li, He, Yu-Zhang, Lang, Xiu-Lan, Zhou, Ming-Hui
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.3915
Date:
July, 2000
File:
PDF, 189 KB
english, 2000
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