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Hydrogen Effect on Damage Structure of Si(100) Surface Studied by in Situ Raman Spectroscopy
Hara, Takanobu, Yoshida, Tomoko, Tanabe, Tetsuo, Ii, TatsuyaVolume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.4427
Date:
July, 2000
File:
PDF, 861 KB
english, 2000