Formation and Properties of Carbon Nitride Thin Films by...

Japanese Journal of Applied Physics 2001 / 2 Vol. 40; Iss. Part 1, No

Formation and Properties of Carbon Nitride Thin Films by Pulsed Nd:YAG Laser Deposition

Suda, Yoshiaki, Doi, Kazuya, Namba, Jun, Imura, Fumiaki, Kawasaki, Hiroharu
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.1061
Date:
February, 2001
File:
PDF, 1.19 MB
english, 2001
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