Damage Resistant and Low Stress EUV Multilayer Mirrors

Japanese Journal of Applied Physics 2002 / 6 Vol. 41; Iss. Part 1, No

Damage Resistant and Low Stress EUV Multilayer Mirrors

Feigl, Torsten, Yulin, Sergiy, Kuhlmann, Thomas, Kaiser, Norbert
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.4082
Date:
June, 2002
File:
PDF, 424 KB
english, 2002
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