Stabilization of Moisture-Premixed Copper Chemical Vapor Deposition Precursor and Applicability
Nasu, Akinobu, Girard, Jean-MarcVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.6488
Date:
November, 2002
File:
PDF, 838 KB
english, 2002