Crystal Growth and Interfacial Characterization of Dielectric BaZrO 3 Thin Films on Si Substrates
Matsui, Toshiyuki, Kitano, Yasuhiro, Fujimura, Norifumi, Morii, Kenji, Ito, TaichiroVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.6639
Date:
November, 2002
File:
PDF, 336 KB
english, 2002