A Study of Capacitively Coupled Plasma Generation in...

Japanese Journal of Applied Physics 2002 / 8 Vol. 41; Iss. Part 2, No

A Study of Capacitively Coupled Plasma Generation in Single-Loop Antennas

Shindo, Haruo, Kudo, Daisuke, Fujii, Syuitsu
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L956
Date:
August, 2002
File:
PDF, 291 KB
english, 2002
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