Miniaturization of a Thermally Driven Ni|Si Bimorph

Japanese Journal of Applied Physics 2003 / 7 Vol. 42; Iss. Part 1, No

Miniaturization of a Thermally Driven Ni|Si Bimorph

Tomonari, Shigeaki, Yoshida, Hitoshi, Kamakura, Masanao, Yoshida, Kazushi, Kawahito, Keiko, Saitoh, Masaaki, Kawada, Hiroshi, Juodkazis, Saulius, Misawa, Hiroaki
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.4464
Date:
July, 2003
File:
PDF, 546 KB
english, 2003
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