Comparative Studies of Perfluorocarbon Alternative Gas...

Japanese Journal of Applied Physics 2003 / 9 Vol. 42; Iss. Part 1, No

Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch

Nakamura, Shingo, Itano, Mitsushi, Aoyama, Hirokazu, Shibahara, Kentaro, Yokoyama, Shin, Hirose, Masataka
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.5759
Date:
September, 2003
File:
PDF, 226 KB
english, 2003
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