Evaluation of Interface States Density and Minority Carrier Generation Lifetime for Strained Si/SiGe Wafers Using Transient Capacitance Method
Wang, Dong, Ninomiya, Masaharu, Nakamae, Masahiko, Nakashima, HiroshiVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2390
Date:
April, 2005
File:
PDF, 124 KB
english, 2005