Design and Fabrication of a Micro Electro Mechanical Systems-Based Electrolytic Tilt Sensor
Kang, Ik-Su, Jung, Ho, Kim, Chang Jin, Kwon, Byong Jo, Kim, Woo-Jeong, Choi, Sie-Young, Lee, Jong-Hyun, Shin, Jang-Kyoo, Kong, Seong HoVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5626
Date:
June, 2006
File:
PDF, 286 KB
english, 2006